Skip to main navigation Skip to main content
info(at)avldigital.remove-this.de
Deutsch English
Narrow Search
Search narrowed by
Last searches

Results for *

Displaying results 1 to 1 of 1.

  1. Charakterisierung von Eigenspannungen in Multi-Layer-Systemen
    Author: Hiltmann, Kai
    Published: 1990

    Location:
    Universitätsbibliothek Stuttgart
    Inter-library loan:
    No inter-library loan
    Export to reference management software   RIS file
      BibTeX file
    Content information
    Volltext (kostenfrei)
    Source: Union catalogues
    Language: German
    Media type: Dissertation
    Format: Online
    Other identifier:
    Diplomarbeit Nr. 752 286
    Subjects: Eigenspannung; Mehrschichtsystem; Charakterisierung; Finite-Elemente-Methode; Dünnschichttechnik; Silicium; Thermische Oxidation
    Scope: IV, 179 S.
    Notes:

    Stuttgart, Univ., Diplomarbeit, 1990